@incollection{Zhang17,
author = {Zhuoqing Yang and Yi Zhang},
title = {Lab-on-a-Tube Surface Micromachining Technology},
booktitle = {Thin Film Processes},
publisher = {IntechOpen},
address = {Rijeka},
year = {2017},
editor = {Jagannathan Thirumalai},
chapter = {5},
doi = {10.5772/66664},
url = {https://doi.org/10.5772/66664}
}