@incollection{Hamouda17,
author = {Abdelhanin Aassime and Frederic Hamouda},
title = {Conventional and Un-Conventional Lithography for Fabricating Thin Film Functional Devices},
booktitle = {Modern Technologies for Creating the Thin-film Systems and Coatings},
publisher = {IntechOpen},
address = {Rijeka},
year = {2017},
editor = {Nikolay N. Nikitenkov},
chapter = {3},
doi = {10.5772/66028},
url = {https://doi.org/10.5772/66028}
}