@incollection{Yao17,
author = {Dahi Ghareab Abdelsalam and Baoli Yao},
title = {Interferometry and its Applications in Surface Metrology},
booktitle = {Optical Interferometry},
publisher = {IntechOpen},
address = {Rijeka},
year = {2017},
editor = {Alexander A. Banishev and Mithun Bhowmick and Jue Wang},
chapter = {5},
doi = {10.5772/66275},
url = {https://doi.org/10.5772/66275}
}