@incollection{Liao16,
author = {Changhong Wu and Xiaoyan Liao},
title = {Lubrication in Chemical and Mechanical Planarization},
booktitle = {Advances in Tribology},
publisher = {IntechOpen},
address = {Rijeka},
year = {2016},
editor = {Pranav H. Darji},
chapter = {11},
doi = {10.5772/64484},
url = {https://doi.org/10.5772/64484}
}