@incollection{Kitahara17,
author = {Akito Hara and Kuninori Kitahara},
title = {Hydrogenation of Polycrystalline Silicon Thin‐Film Transistors},
booktitle = {New Advances in Hydrogenation Processes},
publisher = {IntechOpen},
address = {Rijeka},
year = {2017},
editor = {Maryam Takht Ravanchi},
chapter = {5},
doi = {10.5772/65210},
url = {https://doi.org/10.5772/65210}
}