@incollection{Hamedani16,
author = {Yasaman Hamedani and Prathyushakrishna Macha and Timothy J. Bunning and 
Rajesh R. Naik and Milana C. Vasudev},
title = {Plasma-Enhanced Chemical Vapor Deposition: Where we are and the Outlook for the Future},
booktitle = {Chemical Vapor Deposition},
publisher = {IntechOpen},
address = {Rijeka},
year = {2016},
editor = {Sudheer Neralla},
chapter = {10},
doi = {10.5772/64654},
url = {https://doi.org/10.5772/64654}
}