@incollection{Ichida16,
author = {Yoshio Ichida},
title = {Nanomachining of Fused Quartz Using Atomic Force Microscope},
booktitle = {Nanoelectronics and Materials Development},
publisher = {IntechOpen},
address = {Rijeka},
year = {2016},
editor = {Abhijit Kar},
chapter = {5},
doi = {10.5772/64408},
url = {https://doi.org/10.5772/64408}
}