@incollection{Torres‐Huerta16,
author = {A.M. Torres‐Huerta and M.A. Domínguez‐Crespo and A.B. López‐
Oyama},
title = {Applications of CVD to Produce Thin Films for Solid‐State Devices},
booktitle = {Chemical Vapor Deposition},
publisher = {IntechOpen},
address = {Rijeka},
year = {2016},
editor = {Sudheer Neralla},
chapter = {9},
doi = {10.5772/63964},
url = {https://doi.org/10.5772/63964}
}