@incollection{Moreno16,
author = {Mario Moreno and Roberto Ambrosio and Arturo
Torres and Alfonso Torres and Pedro Rosales and Adrián Itzmoyotl and Miguel Domínguez},
title = {Amorphous, Polymorphous, and Microcrystalline Silicon Thin Films Deposited by Plasma at Low Temperatures},
booktitle = {Crystalline and Non-crystalline Solids},
publisher = {IntechOpen},
address = {Rijeka},
year = {2016},
editor = {Pietro Mandracci},
chapter = {8},
doi = {10.5772/63522},
url = {https://doi.org/10.5772/63522}
}