@incollection{Zhou16,
author = {H. P. Zhou and S. Xu and S. Q. Xiao},
title = {High‐Density Plasma‐Enhanced Chemical Vapor Deposition of Si‐Based Materials for Solar Cell Applications},
booktitle = {Chemical Vapor Deposition},
publisher = {IntechOpen},
address = {Rijeka},
year = {2016},
editor = {Sudheer Neralla},
chapter = {8},
doi = {10.5772/63529},
url = {https://doi.org/10.5772/63529}
}