@incollection{Alarcón-Salazar16,
author = {J. Alarcón-Salazar and R. López-Estopier and E. Quiroga-González and A.
Morales-Sánchez and J. Pedraza-Chávez and I. E. Zaldívar-Huerta and M.
Aceves-Mijares},
title = {Silicon-Rich Oxide Obtained by Low-Pressure Chemical Vapor Deposition to Develop Silicon Light Sources},
booktitle = {Chemical Vapor Deposition},
publisher = {IntechOpen},
address = {Rijeka},
year = {2016},
editor = {Sudheer Neralla},
chapter = {7},
doi = {10.5772/63012},
url = {https://doi.org/10.5772/63012}
}