@incollection{Kariper16, author = {İshak Afşin Kariper}, title = {Hardness of Thin Films and the Influential Factors}, booktitle = {Diamond and Carbon Composites and Nanocomposites}, publisher = {IntechOpen}, address = {Rijeka}, year = {2016}, editor = {Mahmood Aliofkhazraei}, chapter = {1}, doi = {10.5772/63302}, url = {https://doi.org/10.5772/63302} }