@incollection{Kanayama16,
author = {Leonid Bolotov and Toshihiko Kanayama},
title = {Advanced Scanning Tunneling Microscopy for Nanoscale Analysis of Semiconductor Devices},
booktitle = {Microscopy and Analysis},
publisher = {IntechOpen},
address = {Rijeka},
year = {2016},
editor = {Stefan G. Stanciu},
chapter = {12},
doi = {10.5772/62552},
url = {https://doi.org/10.5772/62552}
}