@incollection{Habuka16,
author = {Hitoshi Habuka},
title = {In Situ Observation of Chemical Vapour Deposition Using Langasite Crystal Microbalance},
booktitle = {Chemical Vapor Deposition},
publisher = {IntechOpen},
address = {Rijeka},
year = {2016},
editor = {Sudheer Neralla},
chapter = {5},
doi = {10.5772/62389},
url = {https://doi.org/10.5772/62389}
}