@incollection{Britun16,
author = {Nikolay Britun and Stephanos Konstantinidis and Rony Snyders},
title = {Diagnostics of Magnetron Sputtering Discharges by Resonant Absorption Spectroscopy},
booktitle = {Plasma Science and Technology},
publisher = {IntechOpen},
address = {Rijeka},
year = {2016},
editor = {Tetsu Mieno},
chapter = {12},
doi = {10.5772/61840},
url = {https://doi.org/10.5772/61840}
}