@incollection{Sone15,
author = {Masato Sone and Tetsuya Shimizu and Nao Shinoda and Tso-Fu Mark
Chang},
title = {Nanoscale Cu Wiring by Electrodeposition in Supercritical Carbon Dioxide Emulsified Electrolyte},
booktitle = {Electroplating of Nanostructures},
publisher = {IntechOpen},
address = {Rijeka},
year = {2015},
editor = {Mahmood Aliofkhazraei},
chapter = {9},
doi = {10.5772/61264},
url = {https://doi.org/10.5772/61264}
}