@incollection{Martin15, author = {Lucy Martin and Hua-Khee Chan and Ming-Hung Weng and Alton Horsfall}, title = {Impact of Dielectric Formation and Processing Techniques on the Operation of 4H-SiC MOSFETs}, booktitle = {Advanced Silicon Carbide Devices and Processing}, publisher = {IntechOpen}, address = {Rijeka}, year = {2015}, editor = {Stephen E. Saddow and Francesco La Via}, chapter = {3}, doi = {10.5772/61067}, url = {https://doi.org/10.5772/61067} }