@incollection{Yoshida15,
author = {Sadafumi Yoshida and Yasuto Hijikata and Hiroyuki Yaguchi},
title = {Investigation of SiC/Oxide Interface Structures by Spectroscopic Ellipsometry},
booktitle = {Advanced Silicon Carbide Devices and Processing},
publisher = {IntechOpen},
address = {Rijeka},
year = {2015},
editor = {Stephen E. Saddow and Francesco La Via},
chapter = {4},
doi = {10.5772/61082},
url = {https://doi.org/10.5772/61082}
}