@incollection{Fraga15,
author = {Mariana Amorim Fraga and Matteo Bosi and Marco Negri},
title = {Silicon Carbide in Microsystem Technology — Thin Film Versus Bulk Material},
booktitle = {Advanced Silicon Carbide Devices and Processing},
publisher = {IntechOpen},
address = {Rijeka},
year = {2015},
editor = {Stephen E. Saddow and Francesco La Via},
chapter = {1},
doi = {10.5772/60970},
url = {https://doi.org/10.5772/60970}
}