@incollection{Michaud15,
author = {Jean-François Michaud and Marc Portail and Daniel Alquier},
title = {3C-SiC — From Electronic to MEMS Devices},
booktitle = {Advanced Silicon Carbide Devices and Processing},
publisher = {IntechOpen},
address = {Rijeka},
year = {2015},
editor = {Stephen E. Saddow and Francesco La Via},
chapter = {2},
doi = {10.5772/61020},
url = {https://doi.org/10.5772/61020}
}