@incollection{Barbillon13, author = {Grégory Barbillon}, title = {Sub-30 nm Plasmonic Nanostructures by Soft UV Nanoimprint Lithography}, booktitle = {Updates in Advanced Lithography}, publisher = {IntechOpen}, address = {Rijeka}, year = {2013}, editor = {Sumio Hosaka}, chapter = {8}, doi = {10.5772/56119}, url = {https://doi.org/10.5772/56119} }