@incollection{Jiang13,
author = {Guomin Jiang and Kai Shen and Michael R. Wang},
title = {Fabrication of 3D Micro- and Nano-Structures by Prism-Assisted UV and Holographic Lithography},
booktitle = {Updates in Advanced Lithography},
publisher = {IntechOpen},
address = {Rijeka},
year = {2013},
editor = {Sumio Hosaka},
chapter = {10},
doi = {10.5772/56417},
url = {https://doi.org/10.5772/56417}
}