@incollection{Morita13,
author = {Noritaka Kawasegi and Noboru Morita},
title = {Three-Dimensional Lithography Using Combination of Nanoscale Processing and Wet Chemical Etching},
booktitle = {Updates in Advanced Lithography},
publisher = {IntechOpen},
address = {Rijeka},
year = {2013},
editor = {Sumio Hosaka},
chapter = {4},
doi = {10.5772/56354},
url = {https://doi.org/10.5772/56354}
}