@incollection{Lan13,
author = {Hongbo Lan},
title = {Soft UV Nanoimprint Lithography and Its Applications},
booktitle = {Updates in Advanced Lithography},
publisher = {IntechOpen},
address = {Rijeka},
year = {2013},
editor = {Sumio Hosaka},
chapter = {7},
doi = {10.5772/56186},
url = {https://doi.org/10.5772/56186}
}