@incollection{Fukuda13, author = {Toshio Fukuda and Tomohide Niimi and Goro Obinata}, title = {Micro-Nano Mechatronics - New Trends in Material, Measurement, Control, Manufacturing and Their Applications in Biomedical Engineering}, booktitle = {Micro-Nano Mechatronics}, publisher = {IntechOpen}, address = {Rijeka}, year = {2013}, editor = {Toshio Fukuda and Tomohide Niimi and Goro Obinata}, chapter = {1}, doi = {}, url = {https://doi.org/} }