@incollection{Arjmandi13,
author = {Nima Arjmandi},
title = {Resist Homogeneity},
booktitle = {Updates in Advanced Lithography},
publisher = {IntechOpen},
address = {Rijeka},
year = {2013},
editor = {Sumio Hosaka},
chapter = {6},
doi = {10.5772/56618},
url = {https://doi.org/10.5772/56618}
}