@incollection{Mastai13,
author = {Hagay Moshe and Yitzhak Mastai},
title = {Atomic Layer Deposition on Self-Assembled-Monolayers},
booktitle = {Materials Science},
publisher = {IntechOpen},
address = {Rijeka},
year = {2013},
editor = {Yitzhak Mastai},
chapter = {3},
doi = {10.5772/54814},
url = {https://doi.org/10.5772/54814}
}