@incollection{Petrossians13,
author = {Artin Petrossians and John J. Whalen III and James D. Weiland and Florian
Mansfeld},
title = {Nanotechnology for Packaging},
booktitle = {Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies},
publisher = {IntechOpen},
address = {Rijeka},
year = {2013},
editor = {Kenichi Takahata},
chapter = {9},
doi = {10.5772/55033},
url = {https://doi.org/10.5772/55033}
}