@incollection{Kim13,
author = {Gunasekaran Venugopal and Sang-Jae Kim},
title = {Nanolithography},
booktitle = {Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies},
publisher = {IntechOpen},
address = {Rijeka},
year = {2013},
editor = {Kenichi Takahata},
chapter = {8},
doi = {10.5772/55527},
url = {https://doi.org/10.5772/55527}
}