@incollection{Miki13,
author = {Norihisa Miki},
title = {Liquid Encapsulation Technology for Microelectromechanical Systems},
booktitle = {Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies},
publisher = {IntechOpen},
address = {Rijeka},
year = {2013},
editor = {Kenichi Takahata},
chapter = {2},
doi = {10.5772/55514},
url = {https://doi.org/10.5772/55514}
}