@incollection{Dennis13,
author = {John Ojur Dennis and Farooq Ahmad and M. Haris Khir},
title = {CMOS Compatible Bulk Micromachining},
booktitle = {Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies},
publisher = {IntechOpen},
address = {Rijeka},
year = {2013},
editor = {Kenichi Takahata},
chapter = {5},
doi = {10.5772/55526},
url = {https://doi.org/10.5772/55526}
}