@incollection{Sadeghian13, author = {Hamed Sadeghian and Fred van Keulen and Hans Goosen}, title = {Mechanics of Nanoelectromechanical Systems: Bridging the Gap Between Experiment and Theory}, booktitle = {Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies}, publisher = {IntechOpen}, address = {Rijeka}, year = {2013}, editor = {Kenichi Takahata}, chapter = {7}, doi = {10.5772/55440}, url = {https://doi.org/10.5772/55440} }