@incollection{Sekhar12,
author = {Vasarla Nagendra Sekhar},
title = {Mechanical Characterization of Black Diamond (Low-k) Structures for 3D Integrated Circuit and Packaging Applications},
booktitle = {Nanoindentation in Materials Science},
publisher = {IntechOpen},
address = {Rijeka},
year = {2012},
editor = {Jiri Nemecek},
chapter = {10},
doi = {10.5772/53198},
url = {https://doi.org/10.5772/53198}
}