@incollection{Gupta12,
author = {Sanjeev Kumar Gupta and Jitendra Singh and Jamil Akhtar},
title = {Materials and Processing for Gate Dielectrics on Silicon Carbide (SiC) Surface},
booktitle = {Physics and Technology of Silicon Carbide Devices},
publisher = {IntechOpen},
address = {Rijeka},
year = {2012},
editor = {Yasuto Hijikata},
chapter = {8},
doi = {10.5772/52553},
url = {https://doi.org/10.5772/52553}
}