@incollection{Ghazanfari12,
author = {Mahboobeh Mahmoodi and Lida Ghazanfari},
title = {Silicon Carbide: A Biocompatible Semiconductor Used in Advanced Biosensors and BioMEMS/NEMS},
booktitle = {Physics and Technology of Silicon Carbide Devices},
publisher = {IntechOpen},
address = {Rijeka},
year = {2012},
editor = {Yasuto Hijikata},
chapter = {15},
doi = {10.5772/51811},
url = {https://doi.org/10.5772/51811}
}