@incollection{Yao12,
author = {Hao Ren and Jun Yao},
title = {FEA in Micro-Electro-Mechanical Systems (MEMS) Applications: A Micromachined Spatial Light Modulator (μSLM)},
booktitle = {Finite Element Analysis},
publisher = {IntechOpen},
address = {Rijeka},
year = {2012},
editor = {Farzad Ebrahimi},
chapter = {8},
doi = {10.5772/48532},
url = {https://doi.org/10.5772/48532}
}