@incollection{Firdaus12,
author = {Sh Mohd Firdaus and Husna Omar and Ishak Abd Azid},
title = {High Sensitive Piezoresistive Cantilever MEMS Based Sensor by Introducing Stress Concentration Region (SCR)},
booktitle = {Finite Element Analysis},
publisher = {IntechOpen},
address = {Rijeka},
year = {2012},
editor = {Farzad Ebrahimi},
chapter = {11},
doi = {10.5772/48253},
url = {https://doi.org/10.5772/48253}
}