@incollection{Hosoi12,
author = {Heiji Watanabe and Takuji Hosoi},
title = {Fundamental Aspects of Silicon Carbide Oxidation},
booktitle = {Physics and Technology of Silicon Carbide Devices},
publisher = {IntechOpen},
address = {Rijeka},
year = {2012},
editor = {Yasuto Hijikata},
chapter = {9},
doi = {10.5772/51514},
url = {https://doi.org/10.5772/51514}
}