@incollection{Lee12,
author = {He Seung Lee and Albert. S. Lee and Kyung-Youl Baek and Seung Sang Hwang},
title = {Low Dielectric Materials for Microelectronics},
booktitle = {Dielectric Material},
publisher = {IntechOpen},
address = {Rijeka},
year = {2012},
editor = {Marius Alexandru Silaghi},
chapter = {3},
doi = {10.5772/51499},
url = {https://doi.org/10.5772/51499}
}