@incollection{Tran12,
author = {N.D. Tran and N. Harada and T. Sasaki and T. Kikuchi},
title = {Effect of Dielectric in a Plasma Annealing System at Atmospheric Pressure},
booktitle = {Dielectric Material},
publisher = {IntechOpen},
address = {Rijeka},
year = {2012},
editor = {Marius Alexandru Silaghi},
chapter = {8},
doi = {10.5772/50594},
url = {https://doi.org/10.5772/50594}
}