@incollection{Sato12, author = {Hiroki Nagai and Mitsunobu Sato}, title = {Heat Treatment in Molecular Precursor Method for Fabricating Metal Oxide Thin Films}, booktitle = {Heat Treatment}, publisher = {IntechOpen}, address = {Rijeka}, year = {2012}, editor = {Frank Czerwinski}, chapter = {13}, doi = {10.5772/50676}, url = {https://doi.org/10.5772/50676} }