@incollection{Razak12,
author = {Noriah Bidin and Siti Noraiza Ab Razak},
title = {ArF Excimer Laser Annealing of Polycrystalline Silicon Thin Film},
booktitle = {Crystallization},
publisher = {IntechOpen},
address = {Rijeka},
year = {2012},
editor = {Marcello Rubens Barsi Andreeta},
chapter = {18},
doi = {10.5772/52458},
url = {https://doi.org/10.5772/52458}
}