@incollection{Kosemura12,
author = {Daisuke Kosemura and Motohiro Tomita and Koji Usuda and Atsushi Ogura},
title = {Stress Measurements in Si and SiGe by Liquid-Immersion Raman Spectroscopy},
booktitle = {Advanced Aspects of Spectroscopy},
publisher = {IntechOpen},
address = {Rijeka},
year = {2012},
editor = {Muhammad Akhyar Farrukh},
chapter = {9},
doi = {10.5772/47831},
url = {https://doi.org/10.5772/47831}
}