@incollection{Fraga12,
author = {Mariana Amorim Fraga and Rodrigo Sávio Pessoa and Marcos Massi and Homero Santiago Maciel},
title = {Applications of SiC-Based Thin Films in Electronic and MEMS Devices},
booktitle = {Physics and Technology of Silicon Carbide Devices},
publisher = {IntechOpen},
address = {Rijeka},
year = {2012},
editor = {Yasuto Hijikata},
chapter = {13},
doi = {10.5772/50998},
url = {https://doi.org/10.5772/50998}
}