@incollection{Habuka12,
author = {Hitoshi Habuka},
title = {Etching of Silicon Carbide Using Chlorine Trifluoride Gas},
booktitle = {Physics and Technology of Silicon Carbide Devices},
publisher = {IntechOpen},
address = {Rijeka},
year = {2012},
editor = {Yasuto Hijikata},
chapter = {4},
doi = {10.5772/50387},
url = {https://doi.org/10.5772/50387}
}