@incollection{Yoshida12,
author = {Sadafumi Yoshida and Yasuto Hijikata and Hiroyuki Yaguchi},
title = {Nondestructive and Contactless Characterization Method for Spatial Mapping of the Thickness and Electrical Properties in Homo-Epitaxially Grown SiC Epilayers Using Infrared Reflectance Spectroscopy},
booktitle = {Physics and Technology of Silicon Carbide Devices},
publisher = {IntechOpen},
address = {Rijeka},
year = {2012},
editor = {Yasuto Hijikata},
chapter = {1},
doi = {10.5772/50749},
url = {https://doi.org/10.5772/50749}
}