@incollection{Hijikata12,
author = {Yasuto Hijikata and Shuhei Yagi and Hiroyuki Yaguchi and Sadafumi Yoshida},
title = {Thermal Oxidation Mechanism of Silicon Carbide},
booktitle = {Physics and Technology of Silicon Carbide Devices},
publisher = {IntechOpen},
address = {Rijeka},
year = {2012},
editor = {Yasuto Hijikata},
chapter = {7},
doi = {10.5772/50748},
url = {https://doi.org/10.5772/50748}
}