@incollection{Ichikawa12, author = {Yoshiaki Nakamura and Masakazu Ichikawa}, title = {Formation of Ultrahigh Density Quantum Dots Epitaxially Grown on Si Substrates Using Ultrathin SiO2 Film Technique}, booktitle = {State-of-the-Art of Quantum Dot System Fabrications}, publisher = {IntechOpen}, address = {Rijeka}, year = {2012}, editor = {Ameenah Al-Ahmadi}, chapter = {6}, doi = {10.5772/35995}, url = {https://doi.org/10.5772/35995} }