@incollection{Dadwal12,
author = {U. Dadwal and M. Reiche and R. Singh},
title = {Ion Implantation-Induced Layer Splitting of Semiconductors},
booktitle = {Ion Implantation},
publisher = {IntechOpen},
address = {Rijeka},
year = {2012},
editor = {Mark Goorsky},
chapter = {16},
doi = {10.5772/35956},
url = {https://doi.org/10.5772/35956}
}