@incollection{Rémiens12,
author = {D. Rémiens and D. Deresmes and D. Troadec and J. Costecalde},
title = {Ga3+ Focused Ion Beam for Piezo Electric Nano Structuration Fabrication},
booktitle = {Ion Implantation},
publisher = {IntechOpen},
address = {Rijeka},
year = {2012},
editor = {Mark Goorsky},
chapter = {13},
doi = {10.5772/34139},
url = {https://doi.org/10.5772/34139}
}